Overview
The trace (ppm/ppb-level) O3 gas analyzer is designed for continuous, quantitative monitoring of trace ozone. It is widely used in municipal drinking water and industrial wastewater ozone disinfection, semiconductor ultra-clean processing and wafer cleaning, pharmaceutical and food workshop sterilization, and ozone tail gas destruction systems. Delivering precise measurements of O3 in process gas, ambient air, and exhaust streams, it optimizes ozone dosing efficiency, monitors catalyst performance in tail gas destroyers to prevent leakages, and ensures occupational health and safety compliance.
Principle
UV-LED radiation is divided into measurement and reference paths by a beam splitter. The reference beam directly reaches the detector, which converts it into a reference voltage value. Using this reference signal, the aging effect of UV-LED can be almost completely compensated. The measuring beam enters the sample cell, and the gas in the sample cell is absorbed by the radiation in it. The absorption behavior is recorded by the measuring detector and used to calculate the gas concentration in the measuring cuvette.
Application
• Ozone Tail Gas Destruction & Environmental Safety
Off-Gas Destructor Monitoring: Measuring residual ozone at the outlet of ozone catalytic destruct units to ensure the exhausted gas meets strict environmental discharge standards (typically less than 0.1 ppm).
Leak Detection & Ambient Air Safety: High-sensitivity monitoring in ozone generator rooms and surrounding work areas to protect personnel and comply with OSHA/NIOSH occupational exposure limits.
• Water Treatment & Disinfection Processes
Municipal Drinking Water: Continuous monitoring of gas-phase ozone concentration above contact chambers to optimize ozone mass transfer and dosing efficiency.
Industrial & Ultrapure Water: Monitoring ozone levels in loop systems for pharmaceutical USP water, bottled water, and semiconductor ultrapure water (UPW) disinfection.
• Semiconductor & Advanced Electronics Manufacturing
Wafer Cleaning & Wet Benches: High-precision tracking of ozone gas used in preparation of ozonated deionized water (DIO_3) for photoresist stripping and wafer surface cleaning.
Atomic Layer Deposition (ALD) & CVD: Monitoring of high-purity ozone streams used as oxidizing precursors in oxide layer growth and deposition tools.
• Pharmaceutical, Biotech & Food Cleanrooms
Space Sterilization Validation: Measuring high-concentration ppm-level ozone during cleanroom fumigation cycles, followed by monitoring the ozone decay process to verify when the environment is safe for workers to re-enter.
Cold Storage Preservation: Low-concentration ppm-level ozone monitoring in cold storage warehouses to control mold and pathogens on fresh produce without damaging the products.
Measurement components and ranges
• O3: 0 ~ 1ppm up to 2,000ppm
For detailed introduction, please refer to Ultraviolet photometry analyzer.