Overview
The percentage-level (%) Neon (Ne) thermal conductivity analyzer utilizes highly stable Thermal Conductivity Detection (TCD) technology. It is widely used in air separation units (ASU) rare gas extraction, semiconductor excimer laser gas blending (such as Ne/F2 and Ne/Ar), advanced neon and gas-discharge lighting manufacturing, and cryogenic engineering. Delivering precise, online measurements of Ne concentrations in binary or quasi-binary mixtures (such as Ne/He, Ne/N2, or Ne/Ar), it optimizes laser-source gas ratios and monitors distillation stages, serving as critical instrumentation for semiconductor lithography, specialty gas blending, and rare gas reclamation.
Principle
When the sample gas enters the thermal conductivity cell, and a thermistor is used above the film to maintain a constant temperature. In this way, a small cavity is formed below and above the membrane, and the measurement gas can diffuse into it. In this way, the heat loss caused by the thermal conductivity of the sample gas is compensated by heating, and the power required to maintain a constant temperature of the membrane is a measurement of the thermal conductivity of the measured gas.
Application
• Semiconductor Lithography & Excimer Laser Gas Blending
Excimer Laser Buffer Gas Monitoring (ArF/KrF Lasers): Continuous monitoring of neon (Ne) concentration, which acts as the major carrier/buffer gas (typically making up >95% of the mix) in excimer gas mixtures (Ar/F_2/Ne or Kr/F_2/Ne) used for Deep Ultraviolet (DUV) photolithography.
Laser Chamber Recycle Loops: Measuring neon purity in closed-loop recycling and purification units connected to lithography tools, minimizing the waste of expensive neon gas.
• Air Separation Units (ASU) & Crude Ne/He Refining
Helium-Neon Column Monitoring: Tracking neon percentage at the distillation towers of cryogenic air separation plants during the extraction of crude Ne/He concentrates from liquid oxygen.
Isotopic & Pure Neon Final Refining: Online purity verification of purified commercial neon (e.g., 4.5 to 5.0 grade) before compressor bottling and cylinder filling.
• Advanced Lighting & Gas Discharge Tubes
Specialty Lamp & Neon Sign Filling: Continuous quality control of Ne/Ar or Ne/He gas mixtures filled inside neon advertising signs, cold cathode lamps, high-voltage indicator bulbs, and aircraft beacon lights.
Plasma Display Panel (PDP) Manufacturing: Monitoring the precise neon-xenon gas mixture ratio used in specialty industrial and military-grade plasma screen screens.
• Cryogenics & High-Energy Physics Research
Liquid Neon Cryogenic Cooling Systems: In-line monitoring of neon gas purity in helium-neon refrigeration loops used for superconducting magnets and space aerospace sensors, where impurities can freeze and block capillaries.
Particle Physics Detector Gas Tracking: Monitoring the specific gas density and percentage of neon-based gas mixtures used in drift chambers and gas proportional counters at scientific research laboratories.
Measurement components and ranges
• Ne: 0 ~ 10% up to 100%(Vol)
For detailed introduction, please refer to Thermal Conductivity Analyzer.